Semiconductor Production
Air Toxics Notebook
Semiconductor Production
Applicability
eCFR Subpart BBBBB 
[ecfr.gov]
Applies to major source of HAP that manufactures p-type semiconductors and active solid state devices from a wafer substrate, including research and development activities.
Rules apply to small, area sources?
No
Known Sources in NDEE Jurisdiction
No
Date of Original Final Rule
Amendments Dates
07/22/2008 - Amendments
05/22/2003 - Final Rule
State Regulations
This standard is currently not adopted into Title 129. Sources are responsible for ensuring they are in compliance with current federal requirements found for this subpart in the CFR.
Federal Regulations
40 CFR 63.7180
Regulations and Federal Registers
eCFR Subpart BBBBB 
[ecfr.gov]
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